Apparatus and process for measuring the temperature of semiconductor wafers in the presence of radiation absorbing gases

ABSTRACT

An apparatus and method for determining the temperature of a semiconductor wafer in a thermal processing chamber in the presence of a radiation absorbing gas, such as a vapor, is disclosed. The apparatus includes a temperature sensing device which senses the amount of electromagnetic radiation being emitted by a wafer being heated and a gas sensing device which senses the amount of a gas present within the chamber. The system further includes a controller which is placed in communication with the temperature sensing device and the gas sensing device. The controller is configured to determine a correction factor based upon the amount of gas contained within the chamber. The correction factor in combination with information received from the temperature sensing device are then used to determine the temperature of the wafer.

This application is a Divisional of Ser. No. 09/093,493 filed Jun. 8,1998 now U.S. Pat. No. 6,034,357.

FIELD OF THE INVENTION

The present invention is generally directed to a method and to anapparatus for measuring the temperature of semiconductor wafers whilesaid wafers are being heated in a thermal processing chamber. Moreparticularly, the present invention is directed to an apparatus fordetermining the temperature of a semiconductor wafer in a thermalprocessing chamber that contains a gas, such as steam. Specifically, thetemperature of the wafer is determined by not only sensing thermalradiation being emitted by the wafer but also by sensing the amount ofgas contained in the chamber.

BACKGROUND OF THE INVENTION

A thermal processing chamber as used herein refers to a device thatrapidly heats objects, such as semiconductor wafers. Such devicestypically include a substrate holder for holding a semiconductor waferand a light source that emits light energy for heating the wafer. Duringheat treatment, the semiconductor wafers are heated under controlledconditions according to a preset temperature regime.

Many semiconductor heating processes require a wafer to be heated tohigh temperatures so that various chemical and physical transformationscan take place as the wafer is fabricated into a device. During rapidthermal processing, which is one type of processing, semiconductorwafers are typically heated by an array of lights to temperatures, forinstance, from about 100° C. to about 1,200° C., for times which aretypically less than a few minutes. During these processes, one main goalis to heat the wafers as uniformly as possible.

Besides heating semiconductor wafers, thermal processing chambers arealso used to chemically react the wafers with other components containedwithin the chamber such as gases. For instance, various gases can becirculated through the thermal processing chamber which react with thesurface of the semiconductor wafer during heating to form a desired filmor coating on the wafer. For example, in one embodiment, steam can bepresent within the chamber for forming oxidation coatings on the wafer.

For monitoring the temperature of the semiconductor wafer during heattreatment and other processes, thermal processing chambers typicallyinclude radiation sensing devices, such as pyrometers, that sense theradiation being emitted by the semiconductor wafer at a selectedwavelength. For instance, a thermal processing chamber can contain asingle pyrometer or a plurality of pyrometers which sense radiationbeing emitted by a wafer either at a single location or at multiplelocations. By sensing the thermal radiation being emitted by the wafer,the temperature of the wafer can be calculated using, for instance,Planck's Law.

In the past, however, problems have been experienced in determining thetemperature of semiconductor wafers contained in thermal processingchambers using pyrometers when the processing chambers contain radiationabsorbing gases, such as steam. In particular, the gases can absorb someof the thermal radiation being emitted by the wafer before the thermalradiation can be detected by the pyrometer. Thus, the amount of thermalradiation sensed by the pyrometer is less than the actual amount beingemitted by the wafer, which leads to inaccurate temperature readings.

As such, a need currently exists for a process for determining thetemperature of a semiconductor wafer in a thermal processing chamberwhen radiation absorbing gases are present within the chamber. Inparticular, a need exists for a system for determining the temperatureof wafers in thermal processing chambers using pyrometers, when gasessuch as steam are present. Precise temperature determinations in thermalprocessing chambers are especially necessary due to the increasingdemands that are being placed upon the preciseness at which thesemiconductor wafers are heat treated and at which the semiconductordevices are fabricated.

SUMMARY OF THE INVENTION

The present invention recognizes and addresses the foregoingdisadvantages and others of prior art constructions and methods.

Accordingly, it is an object of the present invention to provide animproved process and apparatus for determining the temperature ofsemiconductor wafers in thermal processing chambers using radiationsensing devices.

Another object of the present invention is to provide a system fordetermining the temperature of a semiconductor wafer in a thermalprocessing chamber containing a radiation absorbing gas using aradiation sensing device.

Still another object of the present invention to provide a process bywhich the temperature of a semiconductor wafer is determined in athermal processing chamber when a radiation absorbing gas is presentusing a pyrometer in combination with a gas sensing device.

Another object of the present invention is to provide a system fordetermining the temperature of a semiconductor wafer in a thermalprocessing chamber which includes a radiation sensing device for sensingthermal radiation being emitted by the wafer and a gas sensing devicefor sensing the amount of a gas, such as a liquid vapor, contained inthe chamber. Wherein by knowing the amount of gas contained in thechamber, a correction factor can be calculated for determining thetemperature of the wafer based on information received from theradiation sensing device.

These and other objects of the present invention are achieved byproviding an apparatus adapted to monitor the temperature ofsemiconductor wafers while heating the wafers in an atmospherecontaining a radiation absorbing gas. The apparatus includes a thermalprocessing chamber adapted to contain a semiconductor wafer. A heatingdevice is placed in communication with the thermal processing chamberfor heating a wafer contained in the chamber. The heating device, forinstance, can be a plurality of light energy sources such as lamps thatemit light energy into the chamber.

A radiation sensing device can be placed within the chamber for sensingthermal radiation being emitted by the semiconductor wafer at apredetermined wavelength. A gas sensing device can also be contained inthe chamber for sensing the amount of gas present in the atmospheresurrounding the wafer. A controller, such as a microprocessor, can beplaced in communication with the radiation sensing device and the gassensing device. The controller can be configured to calculate thetemperature of the semiconductor wafer based on information receivedfrom the radiation sensing device and the gas sensing device. Inparticular, the controller can use the information received from the gassensing device to calculate a correction factor which accounts forthermal radiation being absorbed by the gas. The temperature of thewafer can then be calculated using the correction factor in combinationwith the amount of thermal radiation that is sensed by the radiationsensing device.

The radiation sensing device used in the present invention can be, forinstance, a pyrometer. In one embodiment, a plurality of radiationsensing devices can be present within the chamber for sensing thermalradiation being emitted by the wafer at a plurality of locations. Eachof the radiation sensing devices can be in communication with thecontroller for more accurately determining the temperature of the wafer.

When the heating device used to heat the wafer is a plurality of lamps,preferably the lamps are separated from the thermal processing chamberby a window. The window can be used to filter light energy entering thechamber. For instance, the window can substantially prevent light at thewavelength at which the radiation sensing devices operate from enteringthe chamber. For example, in one embodiment, the window can be made fromquartz which is known to effectively absorb light at a wavelength ofabout 2.7 microns.

As described above, a controller is used to calculate the temperature ofthe wafer based on information received from the radiation sensingdevice and the gas sensing device. In one embodiment, the controller canalso be configured to control the amount of heat being emitted by theheating device. In particular, the controller can control the amount ofheat being emitted by the heating device based upon the calculatedtemperature of the wafer for heating the wafer according to a presettemperature regime.

These and other objects of the present invention are also achieved byproviding a process for determining the temperature of a semiconductorwafer in a thermal processing chamber during the presence of a gas, suchas a liquid vapor. The process includes the steps of placing asemiconductor wafer in a thermal processing chamber and heating thewafer in the presence of a gas. A radiation sensing device is used tosense thermal radiation being emitted by the wafer while a gas sensingdevice is used to sense the amount of gas present in the chamber. Basedupon the amount of gas sensed by the gas sensing device, a correctionfactor is determined. The temperature of the semiconductor wafer is thencalculated based upon the amount of thermal radiation sensed by theradiation sensing device and the correction factor.

In one embodiment, the process of the present invention is particularlyadapted to determine the temperature of the semiconductor wafer whenwater vapor is present within the chamber. In this embodiment, the gassensing device can be a water vapor sensing device.

Other objects, features and aspects of the present invention arediscussed in greater detail below.

BRIEF DESCRIPTION OF THE DRAWINGS

A full and enabling disclosure of the present invention, including thebest mode thereof, directed to one of ordinary skill in the art, is setforth more particularly in the remainder of the specification, whichmakes reference to the appended figure in which:

FIG. 1 is a cross-sectional view of one embodiment of a thermalprocessing chamber made in accordance with the present invention.

Repeat use of references characters in the present specification anddrawings is intended to represent same or analogous features or elementsof the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

It is to be understood by one of ordinary skill in the art that thepresent discussion is a description of exemplary embodiments only, andis not intended as limiting the broader aspects of the presentinvention, which broader aspects are embodied in the exemplaryconstruction.

In general, the present invention is directed to an apparatus and methodfor heating semiconductor wafers uniformly and at a controlled rate to atarget temperature. The apparatus includes a thermal processing chamberin communication with a heating device that is used to heat treatsemiconductor wafers contained in the chamber. Besides heating thewafers, the thermal processing chamber is also adapted to circulategases within the chamber which, for instance, can react with the surfaceof the wafer for forming various coatings and films. For example, in oneembodiment, steam can be introduced into the chamber for formingoxidation coatings on the wafer or alternatively to enhance thecharacteristics of the films that are being deposited or grown.

More particularly, the present invention is directed to a system formonitoring the temperature of a semiconductor wafer in a thermalprocessing chamber using a radiation sensing device in the presence of aradiation absorbing gas, such as a liquid vapor. Specifically, besides aradiation sensing device, the system of the present invention includes agas sensing device which senses the amount of gas present in thechamber. Based upon the amount of gas present in the chamber, acorrection factor is determined for correcting for the amount of thermalradiation that is absorbed by the gas and which is not detected by theradiation sensing device. Using the correction factor in combinationwith the amount of thermal radiation being sensed by the radiationsensing device, the temperature of the semiconductor wafer within thechamber can be more accurately determined. In one embodiment, thepresent invention is directed to a system designed to monitor thetemperature of a semiconductor wafer in the presence of water vapor orsteam.

Referring to FIG. 1, a system generally 10 made in accordance with thepresent invention for heat treating a wafer made from a semiconductivematerial, such as silicon, is illustrated. System 10 includes aprocessing chamber 12 adapted to receive substrates such as a wafer 14for conducting various processes. As shown, wafer 14 is positioned on asubstrate holder 15 made from a thermal insulating material such asquartz. Chamber 12 is designed to heat wafer 14 at very rapid rates andunder carefully controlled conditions. Chamber 12 can be made fromvarious materials, including metals and ceramics. For instance, chamber12 can be made from stainless steel or quartz.

When chamber 12 is made from a heat conductive material, preferably thechamber includes a cooling system. For instance, as shown in FIG. 1,chamber 12 includes a cooling conduit 16 wrapped around the perimeter ofthe chamber. Conduit 16 is adapted to circulate a cooling fluid, such aswater, which is used to maintain the walls of chamber 12 at a constanttemperature.

Chamber 12 also includes an inlet 18 and an outlet 20 for introducingliquids and gases into the chamber and/or for maintaining the chamberwithin a preset pressure range. For instance, a gas or vapor can beintroduced into chamber 12 through inlet 18 for reaction with wafer 14.Once processed, the gas can then be evacuated from the chamber usingoutlet 20. In one embodiment, for example, water vapor can be introducedinto chamber 12 for forming an oxidation coating on a wafer. It shouldbe understood, however, that besides water vapor, various other liquidvapors and gases can be introduced into the chamber for reaction withthe wafer.

Alternatively, an inert gas can be fed to chamber 12 through inlet 18for preventing any unwanted or undesirable side reactions from occurringwithin the chamber.

During processing, substrate holder 15, in one embodiment, can beadapted to rotate wafer 14 using a wafer rotation mechanism 21. Rotatingthe wafer promotes greater temperature uniformity over the surface ofthe wafer and promotes enhanced contact between wafer 14 and any gasesintroduced into the chamber. It should be understood, however, thatbesides wafers, chamber 12 is also adapted to process optical parts,films, fibers, ribbons, and other substrates having any particularshape.

A heat source or heating device generally 22 is included incommunication with chamber 12 for heating wafer 14 during processing.Heating device 22 includes a plurality of lamps 24, such astungsten-halogen lamps. As shown in FIG. 1, lamps 24 are placed abovewafer 14. It should be understood, however, that lamps 24 may be placedat any particular location. Further, additional lamps could be includedwithin system 10 if desired, such as below the wafer.

In one embodiment, lamps 24 can be associated with one or morereflectors that assist in directing light energy being emitted by thelamps onto a semiconductor wafer. For instance, each lamp can be placedadjacent to a reflective cavity or a group of lamps can be containedwithin a reflective cavity. The reflector can be a polished concavesurface and/or can include reflective plates which extend adjacent tothe lamps.

The use of lamps 24 as a heat source is generally preferred. Forinstance, lamps have much higher heating and cooling rates than otherheating devices, such as electrical elements or conventional furnaces.Lamps 24 create a rapid isothermal processing system that provideinstantaneous energy, typically requiring a very short and wellcontrolled start up period. The flow of energy from lamps 24 can also beabruptly stopped at any time. As shown in the figure, lamps 24 areequipped with a gradual power controller 25 that can be used to increaseor decrease the electromagnetic energy being emitted by any of thelamps.

In order to monitor the temperature of wafer 14 during the heatingprocess, thermal processing chamber 12 includes one or a plurality ofradiation sensing devices generally 27. Radiation sensing devices 27include a plurality of optical fibers or light pipes 28 which are, inturn, in communication with a plurality of corresponding light detectors30 Optionally, light pipes 28 can be connected to a single lightdetector 30. Optical fibers 28 are configured to receive electromagneticenergy, such as thermal energy or X-ray energy, being emitted by wafer14 at a particular wavelength. The amount of sensed radiation is thencommunicated to light detectors 30 which generate a usable voltagesignal for determining the temperature of the wafer which can becalculated based, in part, on Planck's Law. In one embodiment, eachoptical fiber 28 in combination with a light detector 30 comprises apyrometer.

In general, thermal processing chamber 12 can contain one or a pluralityof radiation sensing devices. In a preferred embodiment, as shown inFIG. 1, thermal processing chamber 12 contains a plurality of radiationsensing devices that measure the temperature of the wafer at differentlocations. Knowing the temperature of the wafer at different locationscan then be used to control the amount of heat being applied to thewafer as will be described in more detail hereinafter.

During the process of the present invention, system 10 should bedesigned such that optical fibers 28 only detect thermal radiation beingemitted by wafer 14 and not detect radiation being emitted by lamps 24.In this regard, system 10 includes a filter window 32 which preventsthermal radiation being emitted by lamps 24 at the wavelength at whichlight detectors 30 operate from entering chamber 12. Filter 32 alsoserves to isolate lamps 24 from wafer 14 and prevent contamination ofthe chamber. Filter 32 as shown in FIG. 1 can be a window positionedbetween chamber 12 and heat source 22. In an alternative embodiment,each lamp 24 can be covered by a separate filter.

In one embodiment, filter 32 is made from fused silica or quartz. Fusedsilica is known to absorb thermal radiation very effectively at selectedwavelengths. For instance, synthetic fused silica is very effective atabsorbing light at a wavelength of from approximately 2.7 micrometers toabout 2.8 micrometers. Thus, in one embodiment, when filter 32 is madefrom synthetic fused silica, light detectors 30 can be configured todetect thermal radiation being emitted by wafer 14 at a wavelength ofabout 2.7 micrometers.

System 10 further includes a system controller 50 which can be, forinstance, a microprocessor. Controller 50 receives voltage signals fromlight detectors 30 that represent the radiation amounts being sampled atthe various locations. Based on the signals received, controller 50 isconfigured to calculate the temperature of wafer 14 at differentlocations.

System controller 50 as shown in FIG. 1 can also be in communicationwith lamp power controller 25. In this arrangement, controller 50 candetermine the temperature of wafer 14, and, based on this information,control the amount of thermal energy being emitted by lamps 24. In thismanner, instantaneous adjustments can be made regarding the conditionswithin reactor 12 for processing wafer 14 within carefully controlledlimits.

In one embodiment, controller 50 can also be used to automaticallycontrol other elements within the system. For instance, controller 50can be used to control the flow rate of gases entering chamber 12through gas inlet 18. As shown, controller 50 can further be used tocontrol the rate at which wafer 14 is rotated within the chamber.

In accordance with the present invention, system 10 further contains agas sensing device 52 which can also be placed in communication withsystem controller 50. Gas sensing device 52 is designed to detect theamount of a radiation absorbing gas contained within thermal processingchamber 12. As described above, when present within thermal processingchamber 12, a gas, such as a vapor, can absorb thermal radiation beingemitted by the wafer yielding slight errors in the temperaturemeasurement of the wafer based upon readings taken by the radiationsensing devices. In accordance with the present invention, gas sensingdevice 52 is provided in order to correct for the presence of the gas.

For instance, system controller 50 can be preprogrammed with apredetermined absorption relationship that connects the concentration ofthe absorbing gas as determined by gas sensing device 52 to signalattenuation by the presence of the gas. The predetermined absorptionrelationship can be constructed empirically, theoretically, or in anycombination. In this manner, once the gas concentration within thechamber is sensed by gas sensing device 52, a correction factor can bedetermined from the predetermined relationship. The correction factorcan then be used as a multiplication factor in combination with the rawdata received from the radiation sensing devices in order to determinethe temperature of the semiconductor wafer. The correction factor can bedetermined statically or dynamically in real-time during processing.

Besides containing a single gas sensing device 52 as shown in FIG. 1,the system of the present invention can also contain a plurality of gassensing devices. For instance, in one embodiment, a plurality of gassensing devices can be used to sense the amount of a particular gas at aplurality of locations within the chamber. Alternatively, or in additionto the above embodiment, the chamber can contain multiple gas sensingdevices which sense different gases within the chamber. For example, insome processes, more than one radiation-absorbing gas may be present.Different gas sensing devices can be used to sense the concentration ofdifferent gases and communicate such information to the controller. Thecontroller can then be configured to calculate a correction factor basedupon the presence of the various gases.

Although the system of the present invention can be designed tocompensate for most any gas or vapor that may be present in the chamber,in one embodiment, the present invention is particularly well suited forcompensating for the presence of water vapor or steam. Water vapor canbe introduced into thermal processing chamber 12 in order to form orfacilitate the formation of oxidation coatings or other films onsemiconductor wafer 14. The water vapor can be injected directly intothe chamber or can be reactively formed in the chamber. Of particulardisadvantage, water molecules are known to absorb thermal radiation at awavelength of 2.7 microns which is the same wavelength that manypyrometers operate at, especially if window 32 is made from quartz.According to the present invention, however, by sensing the amount ofwater vapor within the chamber using vapor sensing device 52, thepresence of water vapor can be accounted for in the determination of thetemperature of the wafer.

These and other modifications and variations to the present inventionmay be practiced by those of ordinary skill in the art, withoutdeparting from the spirit and scope of the present invention, which ismore particularly set forth in the appended claims. In addition, itshould be understood that aspects of the various embodiments may beinterchanged both in whole or in part. Furthermore, those of ordinaryskill in the art will appreciate that the foregoing description is byway of example only, and is not intended to limit the invention sofurther described in such appended claims.

What is claimed is:
 1. An apparatus adapted to monitor the temperatureof semiconductor wafers while heating said wafers in an atmospherecontaining a gas, said apparatus comprising:a thermal processing chamberadapted to contain a semiconductor wafer; a heating device incommunication with said thermal processing chamber for heating asemiconductor wafer contained in said chamber; a temperature sensingdevice for sensing electromagnetic energy being emitted by saidsemiconductor wafer; a gas sensing device for sensing the amount of agas contained in said processing chamber; and a controller incommunication with said temperature sensing device and said gas sensingdevice, said controller being configured to calculate the temperature ofsaid semiconductor wafer based on information received from saidtemperature sensing device and said gas sensing device.
 2. An apparatusas defined in claim 1, wherein said temperature sensing device comprisesa pyrometer.
 3. An apparatus as defined in claim 1, wherein said heatingdevice comprises a plurality of light energy sources.
 4. An apparatus asdefined in claim 3, further comprising a window positioned between saidheating device and said thermal processing chamber for substantiallypreventing light at a predetermined wavelength from entering saidchamber.
 5. An apparatus as defined in claim 4, wherein said window ismade from a material comprising quartz.
 6. An apparatus as defined inclaim 4, wherein said temperature sensing device senses electromagneticenergy being emitted by said wafer at a predetermined wavelength, saidpredetermined wavelength being about 2.7 microns.
 7. An apparatus asdefined in claim 1, wherein said gas sensing device comprises a watervapor sensing device.
 8. An apparatus as defined in claim 1, whereinsaid controller is also in communication with said heating device, saidcontroller being configured to control the amount of heat being emittedby said heating device in response to the calculated temperature of saidsemiconductor wafer.
 9. An apparatus as defined in claim 1, furthercomprising a substrate holder for receiving said semiconductor waferwithin said thermal processing chamber, said substrate holder beingconfigured to rotate said wafer.
 10. An apparatus as defined in claim 1,wherein said apparatus includes a plurality of gas sensing devices. 11.An apparatus as defined in claim 10, wherein said plurality of gassensing devices comprises a first gas sensing device for sensing theamount of a first gas contained in said processing chamber and a secondgas sensing device for sensing the amount of a second gas contained insaid processing chamber, said first gas sensing device and said secondgas sensing device being in communication with said controller.
 12. Anapparatus adapted to monitor the temperature of semiconductor waferswhile heating said wafers in an atmosphere containing water vapor, saidapparatus comprising:a thermal processing chamber adapted to contain asemiconductor wafer; a heating device in communication with said thermalprocessing chamber for heating a semiconductor wafer contained in saidchamber, said heating device comprising a plurality of light energysources; a window separating said heating device from said thermalprocessing chamber; a temperature sensing device for sensingelectromagnetic energy being emitted by said semiconductor wafer at apredetermined wavelength; a water vapor sensing device for sensing theamount of water vapor contained in said processing chamber; and acontroller in communication with said temperature sensing device andsaid water vapor sensing device, said controller being configured tocalculate the temperature of said semiconductor wafer based oninformation received from both said temperature sensing device and saidwater vapor sensing device.
 13. An apparatus as defined in claim 12,wherein said apparatus comprises a plurality of temperature sensingdevices which sense electromagnetic energy being emitted by saidsemiconductor wafer at a plurality of locations on said wafer, each ofsaid temperature sensing devices being in communication with saidcontroller.
 14. An apparatus as defined in claim 12, wherein saidtemperature sensing device comprises a pyrometer.
 15. An apparatus asdefined in claim 12, wherein said controller is also in communicationwith said plurality of said light energy sources, said controller beingconfigured to control the amount of light energy being emitted by saidlight energy sources in response to the calculated temperature of saidsemiconductor wafer.
 16. An apparatus as defined in claim 15, whereinsaid controller comprises a microprocessor.
 17. An apparatus as definedin claim 12, wherein said window is made from a material comprisingquartz and wherein said predetermined wavelength is about 2.7 microns.